Miltistage Vacuum Pump 150 L min Vacuum Degree For Semiconductor Industry

Miltistage Vacuum Pump 150 L min Vacuum Degree For Semiconductor Industry

CZPT Multiphase Dry Vacuum Pump CZPT Knowledge


Design five series    MRD5320 MRD5380 MRD5480 MRD5600 MRD5750 MRD5880
Pumping Ability(fifty/60Hz) mthree/hr 270/320 330/380 four hundred/460 550/650 650/780 800/950
Supreme Pressure(fifty/60Hz) Mbar(A) .two/.15 .fifteen/.10
Motor Energy (IEC Motor) kw 7.five 15 18.five
Motor Velocity(50/60Hz) Rpm 2960/3570
Approach Link
Inlet Flange DIN/ASME DN80 PN10 (3″ 150#) DN100 PN10 (4″ a hundred and fifty#) DN150 PN10 (five” a hundred and fifty#)
Exhaust Flange DIN/ASME DN40 PN10 (1.5″ Feminine) DN50 PN10 (2″ Woman)
Cooling Water
Max Inlet Strain bar 4
Max Outlet Temperature °C 70 60
Gearing Oil Type   Shell T-sixty eight Shell T-sixty eight
Seal Variety
Gearing End Seal   CZPT seal + Lip Seal
Bearing End Seal   Piston Ring Seal + Gas purge Seal
Seal Purge Seal
Nitrogen Stress Bar .one-.25
Connection   .25In Woman / Φ6 Tube
Noise Amount(fifty/60Hz) dB 78 eighty
Vibration μm <20 <25
Excess weight (with motor) Kg 385 415 435 710 760 800
Max Exhaust Gasoline Temperature °C fifty 55 sixty seventy five eighty 85
Max Pump Surface area Temperature °C 25 25 twenty five 32 32 32

CZPT Multiphase Dry Vacuum Pump characteristic benefit:


Pump Type Multistage Vacuum dry Pump Screw Vacuum   dry Pump Scroll vacuum dry pump Air cooled roots pump Liquid Ring pump Oil Rotary Vane Pumps Oil rotary piston pump
Capacity 100-20000m3/h eighty-3000m3/h ten-60mthree/h a thousand-20000m3/h twenty-10000m3/h twenty-1000mthree/h a hundred and fifty-800mthree/h
Force .one1013mbar .11013mbar .051013mbar 2001013mbar fifty1013mbar .0011013mbar .0051013mbar
Exhaust √Gas √Gas √Gas √Gas (drinking water) (Oil) (Oil)
Energy Lowest Low Low Largest Largest Center Massive
Greatest Low Low CZPTer CZPTer General Low
>3000rpm >3000rpm 1five hundred-3000rpm 1000-1500rpm 500-1500rpm five hundred-1500rpm five hundred-1000rpm
Rotor rotation Concentric Concentric Eccentric Concentric Eccentric Eccentric Eccentric
Gasoline Air
Gas Steam        
Gas Substantial boiling        
Gas Dust            
Gas Corrosive              
Gas explosive          

CZPT Multistage Dry Vacuum Pump structure benefit

Multiphase Dry Vacuum Pump Gas Way


CZPT dry vacuum pump Gasoline Way


  • Airflow route radial, Corrosive approach fuel does not attack the bearing and equipment axially immediate
  • Airflow path axial, Corrosive procedure attack the bearing and gear axially in gear cap violent
  • Procedure fuel is compressed uniformly in each stage of rotors. Uniform compression heat, so reduced exhaust fuel temperature
  • The process gasoline is compressed centrally at the finish of screw, so higher exhaust fuel temperature and screw
  • Procedure gasoline could speak to with more cooling jacket surface, large warmth dissipation efficiency
  • Procedure gas could contact with handful of cooling jacket floor, minimal warmth dissipation
  • Roots rotor is a lot more resistant to particles and adherents, couple of impacts on its performance after its floor use and corrosion
  • CZPT rotor is unsuitable for particles and adherents, large impacts on its efficiency following its surface area put on and corrosion

CZPT Exhibitions

CZPT Global Consumers:

CZPT Product CZPT:


Q1: Are you factory or trade firm?
A1: We are factory.

A2: What the just address of your manufacturing facility? 

A2: Our company is located in No. 6767, Tingfeng Rd. CZPTn District, ZheJiang  201502, China
And our factory is located in No.58,Hulu road, Xinbang Town, CZPT area, CZPTang District, ZheJiang , China

Q3: Warranty phrases of your equipment? 

A3: One calendar year guarantee for the equipment and specialized help in accordance to your needs.

This fall: Will you supply some spare areas of the devices? 

A4: Yes, of system.

Q5: How extended will you get to arrange creation? 

A5: 380V 50HZ we can supply the products within 10 times. Other electrical energy or other coloration we will shipping inside of 22 times

Q6: Can you accept OEM orders? 

A6: Yes, with professional design team, OEM orders are highly welcome.

Miltistage Vacuum Pump 150 L min Vacuum Degree For Semiconductor Industry